Transmission electron microscopy of silicon VLSI circuits and struct ures / R.B. Marcus and T.T. Sheng.

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Material type: Text

TextPublication details: New York : Wiley, c1983.Description: x, 217 p. : ill. ; 29 cmISBN:

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Item type	Current library	Status	Barcode
Books - Open Access	Main Library - Open Shelves	Available	214349

"A Wiley-Interscience publication."

Includes bibliographical references and index.

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