Transmission electron microscopy of silicon VLSI circuits and struct ures /
Marcus, R. B.
Transmission electron microscopy of silicon VLSI circuits and struct ures / R.B. Marcus and T.T. Sheng. - New York : Wiley, c1983. - x, 217 p. : ill. ; 29 cm.
"A Wiley-Interscience publication."
Includes bibliographical references and index.
0471092517 : $47.50 (est.)
83-003469
Integrated circuits.
Transmission electron microscopy.
621.38173 MAR
Transmission electron microscopy of silicon VLSI circuits and struct ures / R.B. Marcus and T.T. Sheng. - New York : Wiley, c1983. - x, 217 p. : ill. ; 29 cm.
"A Wiley-Interscience publication."
Includes bibliographical references and index.
0471092517 : $47.50 (est.)
83-003469
Integrated circuits.
Transmission electron microscopy.
621.38173 MAR