UNIVERSITY LIBRARY CATALOGUE

Transmission electron microscopy of silicon VLSI circuits and struct ures /

Marcus, R. B.

Transmission electron microscopy of silicon VLSI circuits and struct ures / R.B. Marcus and T.T. Sheng. - New York : Wiley, c1983. - x, 217 p. : ill. ; 29 cm.

"A Wiley-Interscience publication."

Includes bibliographical references and index.

0471092517 : $47.50 (est.)

83-003469


Integrated circuits.
Transmission electron microscopy.

621.38173 MAR