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Silicon processing for the VLSI era / Stanley Wolf.

By:

Wolf, Stanley

Material type: Text

Text

TextPublication details: Sunset Beach, Carlifornia: Lattice Press, 1990.Description: 2 v. : ill; 24cmISBN:

096167245.

Subject(s):

DDC classification:

621.3815 WOL

Contents:

Contents: V. 1 Process technology.- V. 2 Process integration.

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Includes index.

Includes bibliographical references

Contents: V. 1 Process technology.- V. 2 Process integration.

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