UNIVERSITY LIBRARY CATALOGUE

Silicon processing for the VLSI era /

Wolf, Stanley.

Silicon processing for the VLSI era / Stanley Wolf. - Sunset Beach, Carlifornia: Lattice Press, 1990. - 2 v. : ill; 24cm.

Includes index.

Includes bibliographical references

Contents: V. 1 Process technology.- V. 2 Process integration.

096167245.


Integrated circuits--Very large scale integration.
Silicon.

621.3815 WOL