Silicon processing for the VLSI era /
Wolf, Stanley.
Silicon processing for the VLSI era / Stanley Wolf. - Sunset Beach, Carlifornia: Lattice Press, 1990. - 2 v. : ill; 24cm.
Includes index.
Includes bibliographical references
Contents: V. 1 Process technology.- V. 2 Process integration.
096167245.
Integrated circuits--Very large scale integration.
Silicon.
621.3815 WOL
Silicon processing for the VLSI era / Stanley Wolf. - Sunset Beach, Carlifornia: Lattice Press, 1990. - 2 v. : ill; 24cm.
Includes index.
Includes bibliographical references
Contents: V. 1 Process technology.- V. 2 Process integration.
096167245.
Integrated circuits--Very large scale integration.
Silicon.
621.3815 WOL