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Force sensors for microelectronic packaging applications / J. Sch wizer, M. Mayer, O. Brand.

By:

Schwizer, Jurg

Contributor(s):

Material type: Text

Text

TextSeries: Microtechnology and MEMSPublication details: Berlin ; New York : Springer, 2004.Description: viii, 178 p. : ill. ; 24 cmISBN:

3540221875 (hbk.)

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DDC classification:

621.381/046 22

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Includes bibliographical references (p. [165]-174) and index.

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