000 01280cam a22003497a 4500
001 vtls000328746
003 UG-KaMUL
005 20250613004003.0
010 _a2004-110615
016 _a971632855
_2 GyFmDB
020 _a3540221875 (hbk.)
035 _a13660907
039 _y 201509031926
_z930
040 _aUKM
_c UKM
_d OHX
_d PU
_d DLC
_d UG-KaMUL
082 _a621.381/046
_2 22
092 _a621.381046 SCHW
100 _aSchwizer, Jurg.
245 _a Force sensors for microelectronic packaging applications /
_cJ. Sch wizer, M. Mayer, O. Brand.
260 _aBerlin ;
_a New York :
_bSpringer,
_c 2004.
300 _aviii, 178 p. :
_bill. ;
_c 24 cm
440 _aMicrotechnology and MEMS
504 _aIncludes bibliographical references (p. [165]-174) and index.
650 _aMicroelectronic packaging.
650 _aWire bonding (Electronic packaging)
700 _aMayer, M.
_q (Michael Andreas),
_d 1971-
700 _aBrand, Oliver,
_d 1964-
856 _3 Table of contents
_u http://www.loc.gov/catdir/toc/fy054/2004110615. html
856 _3 Publisher description
_u http://www.loc.gov/catdir/enhancements/fy08 18/2004110615-d.html
942 _2ddc
_cBK
999 _c558275
_d558275