000			01098cam a2200325 a 4500
001			vtls000287723
003			UG-KaMUL
005			20250613002417.0
010			_a2005-048514
020			_a0471739065 (acidfree paper)
020			_a9780471739067
039			_a201202271159 _b 952 _c 201202081059 _d 930 _c 201103171200 _d 902 _c 201103170946 _d 952 _y 201009201532 _z955
040			_aDLC _d UG-KaMUL
082			_a621.3815/2 _2 22
092			_a621.38152 SCHR
100			_aSchroder, Dieter K.
245			_a Semiconductor material and device characterization / _cDieter K. Sc hroder.
250			_a3rd ed.
260			_a[Piscataway, NJ] : _bIEEE Press, _c c2006.
300			_axv, 779 p. : _bill. ; _c 25 cm.
500			_a"Wiley-Interscience."
504			_aIncludes bibliographical references and index.
650			_aSemiconductors.
650			_aSemiconductors _x Testing.
942			_2ddc _cBK
999			_c536667 _d536667