000			00757nam a22002291a 4500
001			vtls000245887
003			UG-KaMUL
005			20250612202211.0
020			_a0080221122
039			_y200806111912 _z 909
040			_aUG-KaMUL
082			_a621.55
092			_a621.55 VAC
245			_aVacuum and thin film technology : _bproceedings of an international symposium held at the University of Uppsala, Sweden, 31st August-3rd S eptember / _cedited by J. Yarwood and P. Andersson.
260			_aOxford : _bPergamon Press, _c1978.
300			_avi, 412 p. : _bill. ; _c28 cm.
504			_aIncludes bibliographical references and index
650			_aVacuum technology.
942			_2ddc _cBK
999			_c454530 _d454530