000 00973cam a2200289 a 4500
001 vtls000079003
003 UG-KaMUL
005 20250608184336.0
008 050804s1983 nyua b 001 0 eng
010 _a83-003469
020 _a0471092517 :
_c$47.50 (est.)
039 _a200508161244
_b900
_c200508150950
_d927
_y200508041302
_z927
040 _aDLC
_cDLC
_dDLC
_dUG-KaMUL
082 0 _a621.38173 MAR
100 1 _aMarcus, R. B.
_q(Robert B.)
245 1 _aTransmission electron microscopy of silicon VLSI circuits and struct ures /
_cR.B. Marcus and T.T. Sheng.
260 _aNew York :
_bWiley,
_cc1983.
300 _ax, 217 p. :
_bill. ;
_c29 cm.
500 _a"A Wiley-Interscience publication."
504 _aIncludes bibliographical references and index.
650 _aIntegrated circuits.
650 _aTransmission electron microscopy.
700 1 _aSheng, T. T.
_q(Tai Tsu)
942 _2ddc
_cBK
999 _c101120
_d101120