| 000 | 00973cam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | vtls000079003 | ||
| 003 | UG-KaMUL | ||
| 005 | 20250608184336.0 | ||
| 008 | 050804s1983 nyua b 001 0 eng | ||
| 010 | _a83-003469 | ||
| 020 |
_a0471092517 : _c$47.50 (est.) |
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| 039 |
_a200508161244 _b900 _c200508150950 _d927 _y200508041302 _z927 |
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| 040 |
_aDLC _cDLC _dDLC _dUG-KaMUL |
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| 082 | 0 | _a621.38173 MAR | |
| 100 | 1 |
_aMarcus, R. B. _q(Robert B.) |
|
| 245 | 1 |
_aTransmission electron microscopy of silicon VLSI circuits and struct ures / _cR.B. Marcus and T.T. Sheng. |
|
| 260 |
_aNew York : _bWiley, _cc1983. |
||
| 300 |
_ax, 217 p. : _bill. ; _c29 cm. |
||
| 500 | _a"A Wiley-Interscience publication." | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | _aIntegrated circuits. | ||
| 650 | _aTransmission electron microscopy. | ||
| 700 | 1 |
_aSheng, T. T. _q(Tai Tsu) |
|
| 942 |
_2ddc _cBK |
||
| 999 |
_c101120 _d101120 |
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