TY  - BOOK
AU  - Wolf, Stanley.
TI  - Silicon processing for the VLSI era
SN  - 096167245.
U1  - 621.3815 WOL 
PY  - 1990///
CY  - Sunset Beach, Carlifornia
PB  - Lattice Press
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Silicon
N1  - Includes index; Includes bibliographical references; Contents: V. 1 Process technology.- V. 2 Process integration
ER  -