Wolf, Stanley. <br/><br/>
Silicon processing for the VLSI era / 
Stanley Wolf. 
 - Sunset Beach, Carlifornia:  Lattice Press,  1990. 
 - 2 v. :  ill;  24cm. 
<br/><br/> Includes index. 
<br/><br/>Includes bibliographical references 
<br/><br/>Contents: V. 1 Process technology.- V. 2 Process integration. 
<br/><br/><label>ISBN: </label>096167245. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Very large scale integration.<br/>Silicon.
<br/><br/><label>Dewey Class. No.: </label>621.3815 WOL