TY  - BOOK
AU  -  Fukuda,Hisashi
ED  -  International Conference on Rapid Thermal Processing for Future Semi conductor Devices (RTP) 
TI  -  Rapid thermol processing for future semiconductor devices : :  proce eedings of the 2001 International Conference on Rapid Thermol Proceedin g for Future Semiconductor Devices (RTP) 2001 held at Ise-Shima, Mie, J apan, November 14-16, 2001 / 
SN  -  0444513396
U1  -  621.38152 
PY  - 2003///
CY  -  Amsterdam : 
PB  -  Elsevier, 
KW  -  Rapid thermal processing
KW  -  Congresses
KW  -  Semiconductors
KW  -  Heat treatment
N1  -  Includes bibliographical references and index
ER  -