Rapid thermol processing for future semiconductor devices : proce eedings of the 2001 International Conference on Rapid Thermol Proceedin g for Future Semiconductor Devices (RTP) 2001 held at Ise-Shima, Mie, J apan, November 14-16, 2001 - International Conference on Rapid Thermal Processing for Future Semi conductor Devices (RTP) 2001 : Ise-Shima, Mie, Japan).; Fukuda, Hisashi (Amsterdam : Elsevier, 2003)
Includes bibliographical references and index.
Keywords: Rapid thermal processing -- Congresses; Semiconductors -- Heat treatment -- Congresses