Rapid thermol processing for future semiconductor devices :    proce eedings of the 2001 International Conference on Rapid Thermol Proceedin g for Future Semiconductor Devices (RTP) 2001 held at Ise-Shima, Mie, J apan, November 14-16, 2001 /  
edited by Hisashi Fukuda. 
 - Amsterdam :    Elsevier,    2003. 
 - 150 p. :    ill. ;    24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0444513396 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Rapid thermal processing -- Congresses.<br/> Semiconductors -- Heat treatment -- Congresses.
<br/><br/><label>Dewey Class. No.: </label>621.38152