TY - BOOK AU - Menz,Wolfgang AU - Dimov,Stefan ED - International Conference on Multi-Material Micro manufacture TI - First international conference on multi-material micro manufacture/ SN - 0080448798 PY - 2005/// CY - Amsterdam: PB - Elsevier, KW - Microtechnology KW - Congresses KW - Microelectromechanical systems N1 - Includes bibliographical references and index ER -