TY  - BOOK
AU  - Campbell, Stephen A.,
TI  - The science and engineering of microelectronic fabrication
SN  - 0195136055 :
U1  - 621.38152 21
PY  - 2001///
CY  - New York
PB  - Oxford University Press
KW  - Semiconductors
KW  - Congresses
N1  - Includes bibliographical references and index
ER  -