TY  - BOOK
AU  - Bebrisch, Raines
AU  - Anderson, hans Henrik.
TI  - Sputtering by partcle bombardment
PY  - 1983///
CY  - Berlin
PB  - Springer-Verlag
KW  - Sputtering (physics)
KW  - Solids
KW  - Effect of radiation on
KW  - Surfaces (Physics)
N1  - Includes bibliographical references and index
ER  -