Sputtering by partcle bombardment  / 
edited by Raines Bebrisch; w ith contributions by R. Bebrisch, ... [et al]. 
 - Berlin :  Springer-Verlag ,  1983. 
 - v. ;  24 cm. 
 - Topics in applied physics ;  v. 47 and 52. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Sputtering (physics).<br/>Solids--Effect of radiation on<br/>Surfaces (Physics)--Effect of radiation on.