Marcus, R. B. <br/><br/>
Transmission electron microscopy of silicon VLSI circuits and struct ures / 
R.B. Marcus and T.T. Sheng. 
 - New York :  Wiley,  c1983. 
 - x, 217 p. :  ill. ;  29 cm. 
<br/><br/> "A Wiley-Interscience publication." 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0471092517 :  $47.50 (est.) 
<br/><br/><label>LCCN: </label>83-003469 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits.<br/>Transmission electron microscopy.
<br/><br/><label>Dewey Class. No.: </label>621.38173 MAR