Rapid thermol processing for future semiconductor devices : proce eedings of the 2001 International Conference on Rapid Thermol Proceedin g for Future Semiconductor Devices (RTP) 2001 held at Ise-Shima, Mie, J apan, November 14-16, 2001 / edited by Hisashi Fukuda.

By:

Contributor(s):

Material type: Text

TextPublication details: Amsterdam : Elsevier, 2003.Description: 150 p. : ill. ; 24 cmISBN:

Subject(s):

DDC classification:

Tags from this library: No tags from this library for this title. Log in to add tags.

Average rating: 0.0 (0 votes)

No physical items for this record

Includes bibliographical references and index.

There are no comments on this title.

to post a comment.

Back to results

UNIVERSITY LIBRARY CATALOGUE