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The science and engineering of microelectronic fabrication / Step hen A. Campbell.
Material type:
TextSeries: The Oxford series in electrical and computer engineeringPublication details: New York : Oxford University Press, 2001.Edition: 2nd edDescription: xiv, 603 p. : ill. ; 24 cmISBN: - 0195136055 :
- 621.38152 21
| Item type | Current library | Call number | Status | Barcode | |
|---|---|---|---|---|---|
Books - Open Access
|
Main Library - IDA Extension | 621.38152 C AM (Browse shelf(Opens below)) | Available | 001008259 |
Includes bibliographical references and index.
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