UNIVERSITY LIBRARY CATALOGUE

Sputtering by partcle bombardment / edited by Raines Bebrisch; w ith contributions by R. Bebrisch, ... [et al].

Contributor(s): Material type: TextTextSeries: Topics in applied physics ; v. 47 and 52.Publication details: Berlin : Springer-Verlag , 1983.Description: v. ; 24 cmSubject(s): Other classification:
  • 535.416 SPU
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Books - Open Access Books - Open Access Main Library - Open Shelves Available 211159

Includes bibliographical references and index.

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