Silicides for VLSI applications /
Murarka, S. P.
Silicides for VLSI applications / S.P. Murarka - New York : Academic Press, 1983 - xi, 200 p. : ill. ; 24 cm.
Includes bibliographical references (p. 177-186) and index
0125112203
Silicides
Electronics-- Materials
Integrated circuits-- Very large scale integration
621.381
Silicides for VLSI applications / S.P. Murarka - New York : Academic Press, 1983 - xi, 200 p. : ill. ; 24 cm.
Includes bibliographical references (p. 177-186) and index
0125112203
Silicides
Electronics-- Materials
Integrated circuits-- Very large scale integration
621.381